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Technical Data for PD Series

Model Unit PD/PDE400 PD/PDE2602
Pumping Speed(50Hz/60Hz) L/min 5556/6667 36111/43333
㎥/hr 333/400 2167/2600
cfm 196/236 1275/1530
Ultimate Pressure Torr ≤ 7.5 X 10-3 ≤ 7.5 X 10-4
Motor Frequency Hz 50/60
Voltage V 220/380/440
Water cooled motor
50Hz/60Hz
Rated Power HP 15/20 15+7.5/20+7.5
kW 11/15 11+5.5/15+5.5
Ultimate
Pressure Power
HP 9.4/10.7 9.4+2.7/10.7+2.7
kW 7/8 7+2/8+2
Air cooled motor 50Hz/60Hz Rated Power HP 15/20 15+7.5/20+7.5
kW 11/15 11+5.5/15+5.5
Ultimate
Pressure Power
HP 9.4/10.7 9.4+2.7/10.7+2.7
kW 7/8 7+2/8+2
Connection Inlet   ISO63 ISO200
Outlet   NW50 NW50
Cooling water Pressure MPa 2.0~4.0
Temp. 6slm 18℃~15slm 25℃
Min.Flow L/min
Connection kg/cm² RC3/8"
N2 Pressure Mpa 0.15~0.2
Dilute Flow L/min By process
Sealing Flow L/min 10
Connection kg/cm² Swagelok 1/4"
PD Dim. L×W×H mm 1582 x 700 x 767 1582 x 700 x 1165
PDE Dim. L×W×H mm 1972 x 700x 767 1952 x 700 x 1165
Weight kg 865 1200
Noise dB <75

Technical Data for PS Series

Model Unit PS80 PS160 PS180
Pumping Speed (50Hz/60Hz) L/min 1300/1600 2150/2600 2500/3000
㎥/hr 80/96 130/156 150/180
cfm 47/57 77/92 88/106
Ultimate Pressure (50Hz/60Hz) Torr ≤ 7.5 ×10-3
mbar ≤ 1×10-2
Pa ≤ 1
Canned Motor Frequency Hz 50/60
Voltage V 220 ~440
Rated power HP 4 6 6
KW 2.98 4.47 4.47
Connection Inlet   NW 50
Outlet   NW40
Cooling water Pressure Kg/㎠ 2.0~4.0
Min.Flow L/min 3L/min 15℃ ~ 7L/min 30℃
Temp.
Connection   RC 3/8"
N2 Pressure Mpa 0.15 ~0.2
Dilute Flow L/min 0~6
Sealing Flow L/min 0~20
Connection   Swagelock 1/4"
Dim. L×W×H mm 814×380×663 895×410×678 920×430×650
Weight kg 280 300 320
Noise dB(A) <68 <70 <70
Control   SEMI E73-0299
System Max.Leak rate mba.l/s 1*10-5
Operation Temp. 5℃~40℃
Operation Moisture RH <90%

Technical Data for PS Series

Model Unit PS302 PS602 PS902 PS1302 PS1802
Pumping Speed (50Hz/60Hz) L/min 4167/5000 8300/10000 12500/15000 17500/21000 25000/30000
㎥/hr 250/300 500/600 750/900 1050/1260 1500/1800
cfm 147/177 294/353 441/530 618/742 883/1060
Ultimate Pressure (50Hz/60Hz) Torr ≤ 7.5 ×10-3
mbar ≤ 1×10-2
Pa ≤ 1
Canned Motor Frequency Hz 50/60
Voltage V 220 ~440
Rated power HP 4+2.5 4+4 6+4 6+6 6+6
KW 2.98+1.86 2.98+2.98 4.47+2.98 4.47+4.47 4.47+4.47
Connection Inlet   ISO100(bolted) ISO160(bolted)
Outlet   NW40
Cooling water Pressure Kg/㎠ 2.0~4.0
Min.Flow L/min 3L/min 15℃ ~ 7L/min 30℃
Temp.
Connection   RC 3/8"
N2 Pressure Mpa 0.15 ~0.2
Dilute Flow L/min 0~6
Sealing Flow L/min 0~20
Connection   Swagelock 1/4"
Dim. L×W×H mm 814×380×820 814×380×915 895×410×943 920×430×957 920×430×1030
Weight kg 350 450 520 540 545
Noise dB(A) <70 <70 <70 <70 <70
Control   SEMI E73-0299
System Max.Leak rate mba.l/s 1*10-5
Operation Temp. 5℃~40℃
Operation Moisture RH <90%

Technical Data for PSE Series

Model Unit PSE80 PSE160 PSE180 PSE250 PSE630
Pumping Speed (50Hz/60Hz) L/min 1300/1600 2150/2600 2500/3000 3470/4170 8300/10000
㎥/hr 80/96 130/156 150/180 208/250 500/600
cfm 47/57 77/92 88/106 123/147 294/353
Ultimate Pressure (50Hz/60Hz) Torr ≤7.5×10-3 ≤9×10-2/
≤3×10-2

≤4×10-2
≤7.5×10-3
mbar ≤1×10-2 ≤1.2×10-1/
≤4×10-2
≤7.5×10-2
Pa ≤1 12/4 ≤1
Canned Motor Frequency Hz 50/60
Voltage V 220 ~380
Rated power HP 5 7.5 7.5 7.5/10 25/30
KW 3.75 5.6 5.6 5.5/7.5 18.5/22
Connection Inlet   NW50 ISO100
Outlet   NW40 ISO63
Cooling water Pressure Kg/㎠ 2.0~4.0
Min.Flow L/min 3L/min 15℃ ~ 7L/min 30℃
Temp.
Connection   RC 3/8"
Full Air Mode (No cooling Water required) Cooler Fan Rated Power HP 0.5
KW 0.373
Water Pump Rated Power HP 0.5
KW 0.373
N2 Pressure Mpa 0.05 0.05~0.2
Dilute Flow L/min 0~60 30~150
Sealing Flow L/min 0~20
Connection   Swagelock 1/4" Swagelock 3/8"
Dim. L×W×H mm 1295*497*586 1295*497*586 1295*497*593 1295*497*593 1831*610*735
Weight kg 300 340 365 400 1050
Noise dB(A) <68 <70 <70 <70 <90
Control   SEMI E73-0299
System Max.Leak rate mba.l/s 1*10-5
Operation Temp. 5℃~40℃
Operation Moisture RH <90%

Technical Data for PSE Series

Model Unit PSE602 PSE902 PSE1302 PSE1802 PS2002 PS2202 PS3002
Pumping Speed
(50Hz/60Hz)
L/min 8300/10000 12500/15000 17500/21000 25000/30000 27500/33300 30000/36500 41500/50000
㎥/hr 500/600 750/900 1050/1260 1500/1800 1667/2000 1833/2200 2500/3000
cfm 294/353 441/530 618/742 883/1060 982/1178 1080/1296 1470/1765
Ultimate Pressure
50Hz/60Hz
Torr ≤ 7.5 X 10-4 ≤ 4 X 10-2 /≤ 2X 10 -2 ≤ 7.5X10-4
mbar ≤ 1X 10-3 ≤ 5 X 10-2 / ≤ 3 X 10 -2 ≤ 1 X 10-3
Pa ≤ 0.1 5/3 ≤ 0.1
Motor Frequency Hz 50/60
Voltage V 220~380
Power HP 5+5 7.5+5 7.5+7.5 7.5+7.5 10+7.5 10+15 30+15
Kw 3.73+3.73 5.6+3.73 5.6+5.6 5.6+5.6 7.5+5.6 7.5+11 22.35+11.18
Connection Inlet   ISO100 ISO160 ISO200
Outlet   NW40 ISO63
Cooling water Max. Pressure kg/cm² 2.0~4
Min. Flow L/min 3L/min 15℃~7L/min 30℃
Temp
Connection   RC3/8"
Full Air Mode
(No cooling water required)
Cooler Fan
Rated Power
HP 0.5 - -
kW 0.373 - -
Water Pump
Rated Power
HP 0.5 - -
kW 0.373 - -
N2 Pressure Mpa 0.05 0.05~0.2
Dilute Flow L/min 0~60 30~150
Sealing Flow L/min 0~20
Connection   Swagelok 1/4" Swagelok 3/8"
DIM L x W x H Cooler 上 mm 1295 X 688 X 1116 -
DIM L x W x H Cooler 옆 mm 1295 X 847 X 923 -
DIM L x W x H mm 1295X497X780 1295X497X812 1295X497X855 1380X497X855 1300X670X1200 2030X525X1430
Weight Kg 455 525 575 560 595 925 1910
Noise dB(A) <70 <75 <95
Interface   SEMI E73-0299
Pump Leak Rate mbar.l/s 1 x 10-5
Operation Temp 5℃~40℃
Operation Moisture RH 90%